Amtech Systems    TEMPE, Ariz., Dec. 18 /PRNewswire-FirstCall/ — Amtech Systems, Inc. (Nasdaq: ASYS), a global supplier of production and automation systems and related supplies for the solar cell, semiconductor, silicon wafer and microelectromechanical system (MEMS) industries, will announce its fourth quarter and fiscal year 2006 financial results after the close of regular market trading on Thursday, December 21, 2006. The Company will report results in a news release issued immediately following the close of the market on December 21, 2006, followed by a conference call to discuss the results starting at 1:30 p.m. Pacific Standard Time (4:30 p.m. Eastern Time).

    What:     Amtech fourth quarter and fiscal year 2006 financial results
              conference call

    When:     Thursday, December 21st at 1:30 p.m. Pacific Standard Time
              (4:30 p.m. ET)

    Webcast:  A live and archived web cast of the conference call can be
              accessed from the investors section of Amtech’s website at
              http://www.amtechsystems.com or at http://www.mkr-group.com (under featured
              events).

    Dial In:  To access the live conference call, dial (800) 366-3908 and
              request the “Amtech” call.

    Replay:   An audio replay of the conference call can be accessed at
              (800) 405-2236.  The replay will be available starting two hours
              after the call and remain in effect for one week through
              Thursday, December 28, 2006 at 11:59 Pacific Time.  The required
              pass code is 11078598#.

    About Amtech Systems, Inc.
    Amtech Systems, Inc. manufactures capital equipment and related consumables used in the manufacture of various thin-wafer materials, primarily silicon wafers for the semiconductor industry, and certain thermal processes and related automation used in fabricating semiconductor devices, MEMS and the photovoltaic or solar cells. These products include horizontal diffusion furnaces, and related automation and polishing carriers, templates and machines.

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